|
|
 |
 |
|
|
|
|
Chip Pump Performance Data
VACUUM FLOW IN SCFM AT DIFFERENT VACUUM LEVELS
| |
3 |
6 |
9 |
12 |
15 |
18 |
21 |
24 |
| C5L7 |
72 |
1.0 |
23.6 |
0.82 |
0.51 |
0.42 |
0.32 |
0.23 |
0.18 |
0.05 |
|
| C5L14 |
72 |
2.0 |
23.6 |
1.6 |
1.0 |
0.83 |
0.64 |
0.45 |
0.35 |
0.09 |
|
| C5L28 |
72 |
4.0 |
23.6 |
3.3 |
2.0 |
1.7 |
1.30 |
0.90 |
0.70 |
0.18 |
|
| C5L42 |
72 |
6.0 |
23.6 |
4.9 |
3.1 |
2.5 |
1.9 |
1.4 |
1.1 |
0.27 |
|
| C5L56 |
72 |
8.0 |
23.6 |
6.6 |
4.1 |
3.3 |
2.6 |
1.8 |
1.4 |
0.36 |
|
| C5L70 |
72 |
10.0 |
23.6 |
8.2 |
5.1 |
4.2 |
3.2 |
2.3 |
1.8 |
0.45 |
|
| C5L84 |
72 |
12.0 |
23.6 |
9.8 |
6.1 |
5.0 |
3.8 |
2.7 |
2.1 |
0.54 |
|
| C5L98 |
72 |
14.0 |
23.6 |
11.5 |
7.1 |
5.8 |
4.5 |
3.2 |
2.5 |
0.63 |
|
| C5L112 |
72 |
16.0 |
23.6 |
13.1 |
8.2 |
6.6 |
5.1 |
3.6 |
2.8 |
0.72 |
|
| C6E7 |
87 |
1.2 |
25.6 |
0.92 |
0.52 |
0.39 |
0.32 |
0.25 |
0.18 |
0.09 |
0.02 |
| C6E14 |
87 |
2.3 |
25.6 |
1.8 |
1.0 |
0.78 |
0.64 |
0.50 |
0.35 |
0.18 |
0.03 |
| C6E28 |
87 |
4.6 |
25.6 |
3.7 |
2.1 |
1.6 |
1.30 |
1.0 |
0.70 |
0.36 |
0.06 |
| C6E42 |
87 |
6.9 |
25.6 |
5.5 |
3.1 |
2.3 |
1.9 |
1.5 |
1.1 |
0.54 |
0.09 |
| C6E56 |
87 |
9.2 |
25.6 |
7.4 |
4.1 |
3.1 |
2.6 |
2.0 |
1.4 |
0.72 |
0.12 |
| C6E70 |
87 |
11.5 |
25.6 |
9.2 |
5.2 |
3.9 |
3.2 |
2.5 |
1.8 |
0.90 |
0.15 |
| C6E84 |
87 |
13.8 |
25.6 |
11.0 |
6.2 |
4.7 |
3.8 |
3.0 |
2.1 |
1.1 |
0.18 |
| C6E98 |
87 |
16.1 |
25.6 |
12.9 |
7.2 |
5.5 |
4.5 |
3.5 |
2.5 |
1.3 |
0.21 |
| C6E112 |
87 |
18.4 |
25.6 |
14.7 |
8.2 |
6.2 |
5.1 |
4.0 |
2.8 |
1.4 |
0.24 |
| C4M5 |
55 |
0.8 |
25.5 |
0.55 |
0.33 |
0.27 |
0.20 |
0.16 |
0.11 |
0.07 |
0.03 |
| C4M10 |
55 |
1.6 |
25.5 |
1.1 |
0.65 |
0.53 |
0.40 |
0.32 |
0.22 |
0.14 |
0.05 |
| C4M20 |
55 |
3.2 |
25.5 |
2.2 |
1.3 |
1.1 |
0.80 |
0.64 |
0.44 |
0.28 |
0.11 |
| C4M30 |
55 |
4.8 |
25.5 |
3.3 |
2.0 |
1.6 |
1.2 |
1.0 |
0.66 |
0.42 |
0.33 |
| C4M40 |
55 |
6.4 |
25.5 |
4.4 |
2.6 |
2.1 |
1.6 |
1.3 |
0.88 |
0.56 |
0.44 |
| C4M50 |
55 |
8.0 |
25.5 |
5.5 |
3.3 |
2.7 |
2.0 |
1.6 |
1.1 |
0.70 |
0.27 |
| C4M60 |
55 |
9.6 |
25.5 |
6.6 |
3.9 |
3.2 |
2.4 |
1.9 |
1.3 |
0.84 |
0.66 |
| C4M70 |
55 |
11.2 |
25.5 |
7.7 |
4.6 |
3.7 |
2.8 |
2.2 |
1.5 |
1.0 |
0.38 |
| C4M80 |
55 |
12.8 |
25.5 |
8.8 |
5.2 |
4.2 |
3.2 |
2.6 |
1.8 |
1.1 |
0.88 |
| C6M5 |
87 |
0.8 |
25.5 |
0.88 |
0.36 |
0.22 |
0.18 |
0.15 |
0.10 |
0.10 |
0.03 |
| C6M10 |
87 |
1.6 |
25.5 |
1.8 |
0.72 |
0.44 |
0.35 |
0.31 |
0.20 |
0.20 |
0.06 |
| C6M20 |
87 |
3.2 |
25.5 |
3.5 |
1.4 |
0.88 |
0.70 |
0.62 |
0.40 |
0.40 |
0.12 |
| C6M30 |
87 |
4.8 |
25.5 |
5.2 |
2.2 |
1.3 |
1.0 |
0.93 |
0.60 |
0.60 |
0.18 |
| C6M40 |
87 |
6.4 |
25.5 |
7.0 |
2.9 |
1.8 |
1.4 |
1.2 |
0.80 |
0.80 |
0.24 |
| C6M50 |
87 |
8.0 |
25.5 |
8.8 |
3.6 |
2.2 |
1.8 |
1.6 |
1.0 |
1.0 |
0.3 |
| C6M60 |
87 |
9.6 |
25.5 |
10.5 |
4.3 |
2.6 |
2.1 |
1.9 |
1.2 |
1.2 |
0.36 |
| C6M70 |
87 |
11.2 |
25.5 |
12.3 |
5.0 |
3.1 |
2.5 |
2.2 |
1.4 |
1.4 |
0.42 |
| C6M80 |
87 |
12.8 |
25.5 |
14.0 |
5.8 |
3.5 |
2.8 |
2.5 |
1.6 |
1.6 |
0.48 |
EVACUATION TIME IN sec/100 cu-in TO REACH DIFFERENT VACUUM LEVELS
| |
3 |
6 |
9 |
12 |
15 |
18 |
21 |
24 |
| C5L7 |
72 |
1.0 |
23.6 |
0.28 |
0.78 |
1.50 |
2.70 |
4.6 |
7.7 |
13.5 |
|
| C5L14 |
72 |
2.0 |
23.6 |
0.14 |
0.39 |
0.77 |
1.40 |
2.3 |
3.9 |
6.8 |
|
| C5L28 |
72 |
4.0 |
23.6 |
0.07 |
0.20 |
0.39 |
0.68 |
1.2 |
1.9 |
3.4 |
|
| C5L42 |
72 |
6.0 |
23.6 |
0.05 |
0.13 |
0.26 |
0.45 |
0.76 |
1.3 |
2.3 |
|
| C5L56 |
72 |
8.0 |
23.6 |
0.04 |
0.10 |
0.19 |
0.34 |
0.57 |
0.97 |
1.7 |
|
| C5L70 |
72 |
10.0 |
23.6 |
0.03 |
0.08 |
0.15 |
0.27 |
0.46 |
0.77 |
1.4 |
|
| C5L84 |
72 |
12.0 |
23.6 |
0.02 |
0.07 |
0.13 |
0.23 |
0.38 |
0.64 |
1.1 |
|
| C5L98 |
72 |
14.0 |
23.6 |
0.02 |
0.06 |
0.11 |
0.19 |
0.33 |
0.55 |
0.97 |
|
| C5L112 |
72 |
16.0 |
23.6 |
0.02 |
0.05 |
0.10 |
0.17 |
0.29 |
0.48 |
0.85 |
|
| C6E7 |
87 |
1.2 |
25.6 |
0.26 |
0.68 |
1.4 |
2.5 |
4.3 |
7.3 |
12.6 |
14.2 |
| C6E14 |
87 |
2.3 |
25.6 |
0.13 |
0.34 |
0.71 |
1.3 |
2.2 |
3.6 |
6.3 |
7.1 |
| C6E28 |
87 |
4.6 |
25.6 |
0.07 |
0.17 |
0.36 |
0.64 |
1.1 |
1.8 |
3.2 |
3.6 |
| C6E42 |
87 |
6.9 |
25.6 |
0.04 |
0.11 |
0.24 |
0.42 |
0.72 |
1.2 |
2.1 |
2.4 |
| C6E56 |
87 |
9.2 |
25.6 |
0.03 |
0.09 |
0.18 |
0.32 |
0.54 |
0.91 |
1.6 |
1.8 |
| C6E70 |
87 |
11.5 |
25.6 |
0.03 |
0.07 |
0.14 |
0.25 |
0.43 |
0.73 |
1.3 |
1.4 |
| C6E84 |
87 |
13.8 |
25.6 |
0.02 |
0.06 |
0.12 |
0.21 |
0.36 |
0.61 |
1.1 |
1.2 |
| C6E98 |
87 |
16.1 |
25.6 |
0.02 |
0.05 |
0.10 |
0.18 |
0.31 |
0.52 |
0.90 |
1.0 |
| C6E112 |
87 |
18.4 |
25.6 |
0.02 |
0.04 |
0.09 |
0.16 |
0.27 |
0.45 |
0.79 |
0.89 |
| C4M5 |
55 |
0.8 |
25.5 |
0.32 |
1.0 |
2.0 |
3.8 |
6.4 |
10.8 |
18.6 |
36.4 |
| C4M10 |
55 |
1.6 |
25.5 |
0.16 |
0.50 |
1.0 |
1.9 |
3.2 |
5.4 |
9.3 |
18.2 |
| C4M20 |
55 |
3.2 |
25.5 |
0.08 |
0.25 |
0.50 |
1.0 |
1.6 |
2.7 |
4.7 |
9.1 |
| C4M30 |
55 |
4.8 |
25.5 |
0.05 |
0.17 |
0.33 |
0.63 |
1.1 |
1.8 |
3.1 |
6.1 |
| C4M40 |
55 |
6.4 |
25.5 |
0.04 |
0.13 |
0.25 |
0.48 |
0.80 |
1.4 |
2.3 |
4.6 |
| C4M50 |
55 |
8.0 |
25.5 |
0.03 |
0.10 |
0.20 |
0.38 |
0.64 |
1.1 |
1.9 |
3.6 |
| C4M60 |
55 |
9.6 |
25.5 |
0.03 |
0.08 |
0.17 |
0.32 |
0.53 |
0.90 |
1.6 |
3.1 |
| C4M70 |
55 |
11.2 |
25.5 |
0.02 |
0.07 |
0.14 |
0.27 |
0.46 |
0.77 |
1.3 |
2.6 |
| C4M80 |
55 |
12.8 |
25.5 |
0.02 |
0.06 |
0.13 |
0.24 |
0.40 |
0.68 |
1.2 |
2.3 |
| C6M5 |
87 |
0.8 |
25.5 |
0.24 |
0.74 |
1.6 |
2.9 |
5.0 |
8.6 |
15.0 |
29.0 |
| C6M10 |
87 |
1.6 |
25.5 |
0.12 |
0.37 |
0.79 |
1.5 |
2.5 |
4.3 |
7.5 |
14.5 |
| C6M20 |
87 |
3.2 |
25.5 |
0.06 |
0.19 |
0.40 |
0.74 |
1.3 |
2.2 |
3.8 |
7.3 |
| C6M30 |
87 |
4.8 |
25.5 |
0.04 |
0.17 |
0.26 |
0.49 |
0.83 |
1.4 |
2.5 |
4.8 |
| C6M40 |
87 |
6.4 |
25.5 |
0.03 |
0.09 |
0.20 |
0.37 |
0.63 |
1.1 |
1.9 |
3.6 |
| C6M50 |
55 |
8.0 |
25.5 |
0.02 |
0.07 |
0.16 |
0.30 |
0.50 |
0.86 |
1.5 |
2.9 |
| C6M60 |
87 |
9.6 |
25.5 |
0.02 |
0.06 |
0.13 |
0.25 |
0.42 |
0.72 |
1.3 |
2.4 |
| C6M70 |
55 |
11.2 |
25.5 |
0.02 |
0.05 |
0.11 |
0.21 |
0.36 |
0.61 |
1.1 |
2.1 |
| C6M80 |
87 |
12.8 |
25.5 |
0.02 |
0.05 |
0.10 |
0.18 |
0.31 |
0.54 |
0.94 |
1.8 |
|
|
|
|
 |
 |
 |
 |
| |
|
 |
 |
| |
|